>>>>>型号:V18345-1010521001 微传感器
【功能描述】
V18345-1010521001 微传感器
微传感器的特征之一是体积小，其敏感元件的尺寸一般为微米级。是由微机械加工技术制作而成的，包括光刻、腐蚀、淀积、
键合和封装等工艺。利用其中的各向异性腐蚀、牺牲层技术LIGA工艺，可以制造出层与层间有很大差别的三维微结构。
包括可活动的膜片、悬臂梁、桥以及凹槽、孔隙、锥体等。
这些微结构与特殊用途的薄膜和高性能的集成电路相结合，已成功地用于制造各种微传感器乃至多功能的敏感元件阵列，
实现了诸如压力、力、加速度、角速率、应力、应变、温度、流量、成像、磁场、湿度、PH值、气体成分、离子和分子浓度以及生物传感器等。
>>>>>型号:V18345-1010521001 微传感器
【英文介绍】
V18345-1010521001 Microsensor
One of the characteristics of microsensors is their small size, and the size of their sensitive elements is generally micron. It is manufactured by micromachining technology, including lithography, corrosion, deposition, bonding and packaging processes. Using the anisotropic corrosion and sacrificial layer technology LIGA process, 3D microstructures with great differences between layers can be fabricated.
Including movable diaphragm, cantilever beam, bridge as well as grooves, pores, cones, etc.
These microstructures, in combination with special-purpose films and high-performance integrated circuits, have been successfully used to fabricate a wide range of microsensors and even multifunctional sensitive element arrays for applications such as pressure, force, acceleration, angular rate, stress, strain, temperature, flow, imaging, magnetic field, humidity, PH, gas composition, ion and molecular concentrations, and biosensors.
>>>>>型号:V18345-1010521001 微传感器
